S. P. Novosyadlyy, V. M. Hryha, I. I. Ivanyshyn, A. O. Petrovanchuk, and I. V. Zholob, “MODELLING OF GAS-PHASE PHOTOSISTULUS PROCESSES OF SUBMICRONIC STRUCTURES LSI/VLSI: Array”, Number, no. 2(46), pp. 61–118, Dec. 2018.