Novosyadlyy, S. P, et al. “MODELLING OF GAS-PHASE PHOTOSISTULUS PROCESSES OF SUBMICRONIC STRUCTURES LSI VLSI: Array”. PRECARPATHIAN BULLETIN OF THE SHEVCHENKO SCIENTIFIC SOCIETY. Number, no. 2(46), Dec. 2018, pp. 61-118, doi:10.31471/2304-7399-2018-2(46)-61-118.